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[IEEE 2015 IEEE International Conference on Plasma Sciences (ICOPS) - Antalya, Turkey (2015.5.24-2015.5.28)] 2015 IEEE International Conference on Plasma Sciences (ICOPS) - Mode transitions in low-pressure nitrogen RF-CCP at different frequencies
Erozbek-Gungor, Ummugul, Bilikmen, Sinan KadriYear:
2015
Language:
english
DOI:
10.1109/plasma.2015.7179778
File:
PDF, 80 KB
english, 2015