SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - MEMS pressure sensor fabricated by advanced bulk micromachining techniques

Vanko, Gabriel, Hudek, Peter, Zehetner, Johann, Dzuba, Jaroslav, Choleva, Pavlina, Vallo, Martin, Rýger, Ivan, Lalinský, Tibor, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel,
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Volume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2017499
File:
PDF, 450 KB
english, 2013
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