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Creation of lithographic masks using a scanning probe microscope
Bizyaev, D. A., Bukharaev, A. A., Ziganshina, S. A., Nurgazizov, N. I., Khanipov, T. F., Chuklanov, A. P.Volume:
44
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739715050042
Date:
November, 2015
File:
PDF, 1.91 MB
english, 2015