Near-zero-residual layer nanoimprint based on hybrid...

Applied Physics A: Materials Science & Processing 2015 / 11 Vol. 121; Iss. 2

Near-zero-residual layer nanoimprint based on hybrid nanoimprint soft lithography

Cui, Yushuang, Lu, Jingjun, Fu, XinXin, Bian, Jie, Yuan, Changsheng, Ge, Haixiong, Chen, Yanfeng
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Volume:
121
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-015-9195-z
Date:
November, 2015
File:
PDF, 993 KB
english, 2015
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