Micro-Electro-Mechanical Parallel Scanning Nano-Probes for...

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Micro-Electro-Mechanical Parallel Scanning Nano-Probes for Nanolithography

Kumar, Varun Subramaniam, Mehdizadeh, Emad, Pourkamali, Siavash
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2016.2543606
File:
PDF, 1.55 MB
english, 2016
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