Micro-Electro-Mechanical Parallel Scanning Nano-Probes for Nanolithography
Kumar, Varun Subramaniam, Mehdizadeh, Emad, Pourkamali, SiavashYear:
2016
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2016.2543606
File:
PDF, 1.55 MB
english, 2016