Synthesis of alicyclic polymers and characterization of chemical amplified positive photoresists having the same
Jui-Hsiang Liu, Ching-Dong Hsieh, Chun-Chieh TsengVolume:
96
Year:
2005
Language:
english
Pages:
10
DOI:
10.1002/app.21324
File:
PDF, 179 KB
english, 2005