[IEEE 2004 IEEE International Reliability Physics...

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[IEEE 2004 IEEE International Reliability Physics Symposium. - Phoenix, AZ, USA (25-29 April 2004)] 2004 IEEE International Reliability Physics Symposium. Proceedings - Effect of magnetic field on plasma damage during VIA etching in sub-micron CMOS technology

Nam Sung Kim,, Hyun Gu Yoon,, Chee Kiat Lee,, Jing Zhao,, Chow Yew Tuck,, Yong Sean Cheah,, Wong Wing Yew,, Southworth, P., Sang Hyun Han,, Pey, K.S.
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Year:
2004
Language:
english
DOI:
10.1109/relphy.2004.1315441
File:
PDF, 214 KB
english, 2004
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