[IEEE 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Wien, Vienna, Austria (2016.1.25-2016.1.27)] 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Direction dependent three-dimensional silicon carbide oxidation growth rate calculations
Simonka, Vito, Nawratil, Georg, Hossinger, Andreas, Weinbub, Josef, Selberherr, SiegfriedYear:
2016
Language:
english
DOI:
10.1109/ulis.2016.7440094
File:
PDF, 1.30 MB
english, 2016