A New Technology of Ultrathin AlN Piezoelectric Sensor for Pulse Wave Measurement
Bongrain, A., Rousseau, L., Valbin, L., Madaoui, N., Lissorgues, G., Verjus, F., Chapon, P.A.Volume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.668
File:
PDF, 875 KB
english, 2015