THE EFFECT OF A SCREENING OXIDE ON ION IMPLANTATION STUDIED...

COMPEL Int J for Computation and Maths in Electrical and Electronic Eng 1992 / 04 Vol. 11; Iss. 4

THE EFFECT OF A SCREENING OXIDE ON ION IMPLANTATION STUDIED BY MONTE CARLO SIMULATIONS

Hobler, G., Pötzl, H.
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Volume:
11
Language:
english
Journal:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
DOI:
10.1108/eb010101
Date:
April, 1992
File:
PDF, 373 KB
english, 1992
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