![](/img/cover-not-exists.png)
Pattern Transfer of Sub-10 nm Features via Tin-Containing Block Copolymers
Maher, Michael J., Mori, Kazunori, Sirard, Stephen M., Dinhobl, Andrew M., Bates, Christopher M., Gurer, Emir, Blachut, Gregory, Lane, Austin P., Durand, William J., Carlson, Matthew C., Strahan, JeffVolume:
5
Language:
english
Journal:
ACS Macro Letters
DOI:
10.1021/acsmacrolett.6b00005
Date:
March, 2016
File:
PDF, 1.86 MB
english, 2016