In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
Leick, N, Weber, J W, Mackus, A J M, Weber, M J, van de Sanden, M C M, Kessels, W M MVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/11/115504
Date:
March, 2016
File:
PDF, 1.37 MB
english, 2016