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Interaction of an argon plasma jet with a silicon wafer
Engelhardt, Max, Pothiraja, Ramasamy, Kartaschew, Konstantin, Bibinov, Nikita, Havenith, Martina, Awakowicz, PeterVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/14/145201
Date:
April, 2016
File:
PDF, 3.51 MB
english, 2016