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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors
Vollebregt, S., Alfano, B., Ricciardella, F., Giesbers, A. J. M., Grachova, Y., van Zeijl, H. W., Polichetti, T., Sarro, P. M.Year:
2016
DOI:
10.1109/memsys.2016.7421546
File:
PDF, 1.03 MB
2016