[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - High dynamic ablation and injection by electric cavitation for wide range of materials
Takahashi, Kazuki, Arakawa, Yuta, Yamanishi, YokoYear:
2016
DOI:
10.1109/memsys.2016.7421547
File:
PDF, 1.05 MB
2016