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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Overcoming stiction forces with resonant over-travel stops
Hong, Vu A., Heinz, David B., Christensen, David L., Shin, Dongsuk D., Chen, Yunhan, Ahn, Chae Hyuck, Yang, Yushi, Ng, Eldwin J., Flader, Ian B., Kenny, Thomas W.Year:
2016
Language:
english
DOI:
10.1109/memsys.2016.7421554
File:
PDF, 656 KB
english, 2016