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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - A multimode single-chip scanning probe microscope for simultaneous topographical and thermal metrology at the nanometer scale
Sarkar, Neil, Lee, Geoffrey, Strathearn, Duncan, Olfat, Mahdi, Mansour, Raafat R.Year:
2016
Language:
english
DOI:
10.1109/memsys.2016.7421556
File:
PDF, 2.07 MB
english, 2016