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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - A universal method to grow and etch graphene film
Deng, Ningqin, Tian, He, Zhao, Haiming, Li, Cheng, Tao, Luqi, Wang, Xuefeng, Mohammad, Mohammad Ali, Mi, Wentian, Yang, Yi, Ren, TianlingYear:
2016
DOI:
10.1109/memsys.2016.7421653
File:
PDF, 799 KB
2016