[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Direct writing of thin and thick metal films via micro glow plasma scanning
Abdul-Wahed, Ahmed M., Roy, Anindya L., Xiao, Zhiming, Takahata, KenichiYear:
2016
DOI:
10.1109/memsys.2016.7421656
File:
PDF, 1.27 MB
2016