[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Micro pillars with thin hydrophobic layer formed on the side walls to prevent cell protrusion toward side wall
Noda, Kentaro, Hirayama, Kayoko, Matsumoto, Kiyoshi, Shimoyama, IsaoYear:
2016
Language:
english
DOI:
10.1109/memsys.2016.7421671
File:
PDF, 642 KB
english, 2016