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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - A vacuum encapsulation technique with novel parasitic optimization methods for VHF MEMS resonators
Zhao, Jicong, Yuan, Quan, Luo, Wei, Kan, Xiao, Zhang, Jinying, Yang, Jinling, Yang, FuhuaYear:
2016
DOI:
10.1109/memsys.2016.7421690
File:
PDF, 625 KB
2016