[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Lorentz force MEMS magnetometer with frequency modulated output
Kumar, Varun, Pourkamali, SiavashYear:
2016
Language:
english
DOI:
10.1109/memsys.2016.7421694
File:
PDF, 471 KB
english, 2016