[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining
van Drieenhuizen, B.P., Wolffenbuttel, R.F.Volume:
1
Year:
1995
Language:
english
DOI:
10.1109/sensor.1995.717110
File:
PDF, 635 KB
english, 1995