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[IEEE 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Washington DC, USA (2015.9.9-2015.9.11)] 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Contact model based on TCAD-experimental interactive algorithm
Feng, Peijie, Kim, Jiseok, Jin Cho,, Pandey, Shesh Mani, Narayanan, Sudarshan, Tng, Michelle, Bingwu Liu,, Banghart, Edmund, Baofu Zhu,, Pei Zhao,, Rahman, Muhammad, Park, Yumi, Liu Jiang,, BenisYear:
2015
Language:
english
DOI:
10.1109/sispad.2015.7292303
File:
PDF, 1.48 MB
english, 2015