SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Advances in Resist Technology and Processing XV - Effects of structural differences in speed enhancers (dissolution promoters) on positive photoresist composition
Cook, Michelle M., Rahman, M. D., Lu, Ping-HungVolume:
3333
Year:
1998
Language:
english
DOI:
10.1117/12.312346
File:
PDF, 2.35 MB
english, 1998