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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Measuring thermal expansion variations in ULE glass with interferometry
Harper, Brian L., Hrdina, Kenneth E., Navan, W. David, Ellison, Joseph, Fanning, Andrew, Mackay, R. ScottVolume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.535133
File:
PDF, 210 KB
english, 2004