SPIE Proceedings [SPIE Optical Metrology - Munich, Germany...

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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Structure modeling for scatterometric characterization of photoinduced surface-relief gratings

Logofatu, Petre C., Apostol, Ileana, Castex, Marie-Claude, Damian, Victor, Iordache, Iuliana, Bojan, Mihaela, Apostol, Dan, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.
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Volume:
6617
Year:
2007
Language:
english
DOI:
10.1117/12.726060
File:
PDF, 465 KB
english, 2007
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