SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Hybrid light source for scanning white light interferometry-based MEMS quality control
Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Räikkönen, H., Wälchli, B., Paulin, T., Kassamakov, I., Grigoras, K., Franssila, S., Hæggström, E., Lehmann, Peter H., Osten, Wolfgang, Gastinger, KayVolume:
8082
Year:
2011
Language:
english
DOI:
10.1117/12.889362
File:
PDF, 508 KB
english, 2011
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