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Robust postfabrication trimming of ultracompact resonators on silicon on insulator with relaxed requirements on resolution and alignment
Alipour, Payam, Atabaki, Amir H., Askari, Murtaza, Adibi, Ali, Eftekhar, Ali. A.Volume:
40
Language:
english
Journal:
Optics Letters
DOI:
10.1364/ol.40.004476
Date:
October, 2015
File:
PDF, 1.82 MB
english, 2015