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Quantitative Ultrasonic Characterization of c-Axis Oriented Polycrystalline AlN Thin Film for Smart Device Application
Habib, A., Shelke, A., Vogel, M., Brand, S., Jiang, Xin, Pietsch, U., Banerjee, S., Kundu, T.Volume:
101
Language:
english
Journal:
Acta Acustica united with Acustica
DOI:
10.3813/aaa.918863
Date:
July, 2015
File:
PDF, 446 KB
english, 2015