Preparation of SiOC nanocomposite films by laser chemical...

Journal of the European Ceramic Society 2016 / 02 Vol. 36; Iss. 3

Preparation of SiOC nanocomposite films by laser chemical vapor deposition

Yu, Shu, Tu, Rong, Goto, Takashi
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Volume:
36
Language:
english
Journal:
Journal of the European Ceramic Society
DOI:
10.1016/j.jeurceramsoc.2015.10.029
Date:
February, 2016
File:
PDF, 2.37 MB
english, 2016
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