Optical emission spectroscopy of sputtered Al atoms from Al...

Physica Scripta 1997 / 01 Vol. T73

Optical emission spectroscopy of sputtered Al atoms from Al and Al 2 O 3 surfaces interacted with Ar q + ( q = 1-9)

Motohashi, Kenji, Tsurubuchi, Seiji, Shimizu, Hiroshi, Mochiji, Kozo, Tanuma, Hajime, Kobayashi, Nobuo
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Volume:
T73
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/1997/t73/109
Date:
January, 1997
File:
PDF, 266 KB
english, 1997
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