Multilayer Fabrication Process for Josephson Junction Circuits Cross-compatible over Two Foundries
Kiviranta, Mikko, Brandel, Oliver, Gronberg, Leif, Kunert, Juergen, Linzen, Sven, Beev, Nikolai, May, Torsten, Prunnila, MikaYear:
2016
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/tasc.2016.2544821
File:
PDF, 419 KB
english, 2016