SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Advances in Patterning Materials and Processes XXXI - An in situ analysis of resist dissolution in alkali-based and organic solvent-based developers using high speed atomic force microscopy

Wallow, Thomas I., Hohle, Christoph K., Santillan, Julius Joseph, Shichiri, Motoharu, Itani, Toshiro
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Volume:
9051
Year:
2014
Language:
english
DOI:
10.1117/12.2045886
File:
PDF, 4.92 MB
english, 2014
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