Full-gap Tracking System for Parallel Plate Electrostatic Actuators using Closed-Loop Control
Moreira, Eurico Esteves, Lima, Vasco, Alves, Filipe Serra, Cabral, Jorge, Gaspar, João, Rocha, Luis AlexandreLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.04.002
Date:
April, 2016
File:
PDF, 2.26 MB
english, 2016