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Vacuum UV broad-band absorption spectroscopy: a powerful diagnostic tool for reactive plasma monitoring
Cunge, G, Fouchier, M, Brihoum, M, Bodart, P, Touzeau, M, Sadeghi, NVolume:
44
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/44/12/122001
Date:
March, 2011
File:
PDF, 156 KB
english, 2011