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The effect of a-GaAs/a-Si double buffer layers on GaAs-on-Si as determined by transmission electron microscopy
Uen, Wu-Yih, Li, Zhen-Yu, Lan, Shan-Ming, Yang, Tsun-Neng, Shin, Hwa-YuhVolume:
21
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/21/7/004
Date:
July, 2006
File:
PDF, 496 KB
english, 2006