Microwave electron cyclotron resonance plasma metal organic chemical vapour deposition of Y 2 O 3 coatings
Barve, S A, Nandurkar, N S, Chand, N, Singh, S B, Mithal, N, Jagannath,, Bhanage, B M, Patil, D S, Gantayet, L MVolume:
114
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/114/1/012045
Date:
May, 2008
File:
PDF, 695 KB
english, 2008