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Research of the measuring technology of MEMS
Kaiduan, Yue, Xiang, Zhou, Xipeng, DuVolume:
13
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/13/1/033
Date:
January, 2005
File:
PDF, 266 KB
english, 2005