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Application of spectroscopic ellipsometry for investigations of compaction and decompaction state in Si-SiO 2 systems
Rzodkiewicz, W, Panas, AVolume:
181
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/181/1/012035
Date:
August, 2009
File:
PDF, 876 KB
english, 2009