SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Advances in Patterning Materials and Processes XXXIII - Quantification of the resist dissolution process: an in situ analysis using high speed atomic force microscopy

Hohle, Christoph K., Younkin, Todd R., Santillan, Julius Joseph, Shichiri, Motoharu, Itani, Toshiro
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Volume:
9779
Year:
2016
Language:
english
DOI:
10.1117/12.2219078
File:
PDF, 2.13 MB
english, 2016
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