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Fabrication of Bragg Grating Structures in Silicon
Heimala, P., Aalto, T., Yliniemi, S., Simonen, J., Kuittinen, M., Turunen, J., Leppihalme, M.Volume:
T101
Year:
2002
Language:
english
Journal:
Physica Scripta
DOI:
10.1238/physica.topical.101a00092
File:
PDF, 131 KB
english, 2002