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Prediction of the Wafer quality with respect to the production equipments data★★This work is part of the European project “INTEGRATE”, and carried by ST-microelectronics Fab.
Melhem, Mariam, Ananou, Bouchra, Djeziri, Mohand, Ouladsine, Mustapha, Pinaton, JacqueVolume:
48
Year:
2015
Language:
english
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2015.09.508
File:
PDF, 793 KB
english, 2015