A CAD investigation of metal-overhang on multiple guard...

Semiconductor Science and Technology 2002 / 12 Vol. 17; Iss. 12

A CAD investigation of metal-overhang on multiple guard ring design for high voltage operation of Si sensors

Bhardwaj, Ashutosh, Ranjan, Kirti, Namrata,, Chatterji, Sudeep, Srivastava, Ajay K, Shivpuri, R K
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Volume:
17
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/17/12/305
Date:
December, 2002
File:
PDF, 993 KB
english, 2002
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