Calibration of stylus profilometers using standards...

Calibration of stylus profilometers using standards calibrated by metrological SFMs

Dai, Gaoliang, Jung, Lena, Koenders, Ludger, Krüger-Sehm, Rolf
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Volume:
13
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/13/1/055
Date:
January, 2005
File:
PDF, 524 KB
english, 2005
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