Nonlinear dynamic response of cantilever beam tip during atomic force microscopy (AFM) nanolithography of copper surface
Yeh, Y-L, Wang, C-C, Jang, M-J, Lin, Y-P, Chen, K-SVolume:
96
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/96/1/012199
Date:
February, 2008
File:
PDF, 460 KB
english, 2008