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Multilevel current stress technique for investigation thin oxide layers of MOS structures
Andreev, V V, Bondarenko, G G, Maslovsky, V M, Stolyarov, A AVolume:
41
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/41/1/012017
Date:
December, 2012
File:
PDF, 447 KB
english, 2012