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[IEEE 2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) - Busan, South Korea (2015.7.7-2015.7.11)] 2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) - Shape behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror
Ciubotariu, Dragos Adrian, Clevy, Cedric, Ivan, Ioan Alexandru, Lutz, PhilippeYear:
2015
Language:
english
DOI:
10.1109/aim.2015.7222575
File:
PDF, 480 KB
english, 2015