[IEEE 1999 Conference on Decision and Control - Phoenix, AZ, USA (7-10 Dec. 1999)] Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No.99CH36304) - Control systems for the nanolithography process
Schaper, C.D., El-Awady, K., Tay, A., Kailath, T.Volume:
4
Year:
1999
Language:
english
DOI:
10.1109/cdc.1999.828016
File:
PDF, 641 KB
english, 1999