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[IEEE Technical Digest. CLEO/Pacific Rim '99 - Seoul, South Korea (30 Aug.-3 Sept. 1999)] Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464) - Very large scale phase measuring interferometry for profile measurement of aspheric surfaces with nanometer accuracy
Seung-Woo Kim,, In-Chul Chang,, Dong-Sik Kim,, Tae-Ho Kim,, Seung-Bong Yoo,Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/cleopr.1999.811628
File:
PDF, 193 KB
english, 1999